Photo from Scientific Research

Open access visualization of Photo, Dielectric Film, Aluminum Oxide, Hafnium Oxide, Superlattice
CC-BY
1
Views
0
Likes

Citation

DOI: 10.1038/s41467-023-37887-x

DOI

Layer-by-layer lamination of 2-inch-size Al 2 O 3 and HfO 2 dielectric film, demonstrating a vdW Al 2 O 3 /HfO 2 /Al 2 O 3 oxide superlattice in wafer scale.

#Photo#Dielectric Film#Aluminum Oxide#Hafnium Oxide#Superlattice#Lamination

Related Plots

Discover More Scientific Plots

Browse thousands of high-quality scientific visualizations from open-access research

Browse All PlotsView Collections