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Inset: pixel-by-pixel histogram distribution of normalized16O counts from the SIMS maps shown in (a) before (red) and after vacuum (black). Main graph: high-resolution16O SIMS depth profiles (obtained with the CAMECA SC-Ultra depth profiling instrument) of the film in its pristine state (solid), after air exposure (dashed) and after different durations of UHV (dotted lines).
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