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Schematic diagram of the CLIEM system. α, Stage tilting angle during FIB milling; β, milling angle between the FIB and the sample plane; P1–P3, sample loading position (P1); LM imaging position (P2) and FIB–SEM position (P3). Abbreviations: objective (OBJ), piezo-stage (PZT), mirror (M), tube lens (TL), scanning lens (SL), galvo scanner (GS), collimating lens (CL), dichroic mirror (DM), pinhole (PH), single-mode (SM) fiber, multimode (MM) fiber and emission filter (EM).

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