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Fabrication of 3DkirigamiMEAs. A) The fabrication of the 2Dkirigamitemplate comprises four steps (Ai): 1) Chemical vapor deposition (CVD) of a 5 µm PaC layer (in gray). 2) Deposition of a Ti/Au/Ti metal layer stack (in yellow). 3) 2nd CVD process for a PaC passivation layer. 4) Reactive ion etching (RIE) to open the electrodes and etch the shape. Exemplary design aimed at retinal applications with 32 shanks (Aii) containing meander-shaped (Aiii) or straight feedlines (Aiv). Additionally, surface electrodes (Av, green arrow) and breaking points for long and/or thin shanks (Av, red arrow) are included in the design.

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