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Depiction of SPDC in a Si 3 N 4 microresonator. After the space-charge grating forms ( a ), pump light at 780 nm is coupled into the resonator and near-infrared entangled photon pairs are generated by SPDC at 1,560 nm. The lasers (both 1,560 and 780 nm) and resonators can be integrated on a semiconductor photonic chip.

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