Heatmap from Scientific Research

Open access visualization of Heatmap, Film Thickness, Wafer, Co-sputtering, LiPO3 Target
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DOI: 10.1002/aenm.202400656

DOI

Distribution of film thickness over the wafer after 8 h co-sputtering of LiPO3and Li3PO4targets displayed as a contour plot using interpolation of measurements over the 76 samples (raw values are provided in FigureS1)

#Heatmap#Film Thickness#Wafer#Co-sputtering#LiPO3 Target#Li3PO4 Target#Contour Plot

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