Microscopy from Scientific Research

Open access visualization of Microscopy, Cr/LixPOyNz/Cr MIM Stack, Microcell, SEM Imaging, Cr/LiPON/Cr Stack
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DOI: 10.1002/aenm.202400656

DOI

Cr/LixPOyNz/Cr MIM stack at the centre of the microcell. SEM imaging of the Cr/LiPON/Cr stack was performed using a SEM-FEG (Zeiss, Sigma 500) equipped with an InLens detector, at a voltage of 10 kV and working distance of 5 mm. High-throughput characterizations.

#Microscopy#Cr/LixPOyNz/Cr MIM Stack#Microcell#SEM Imaging#Cr/LiPON/Cr Stack#SEM-FEG#InLens Detector#High-Throughput Characterizations

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