Top: General TEM image of diamond FIB lamella reveals a completely different structural modification when the laser pulse repetition is increased by a factor of 1000. A series of discrete microscale holes with high aspect ratio form across a 6 m diameter of the column, considerably larger than the 1 m diameter of the beam. The inset shows a dark field image (STEM mode) of the region in the dashed white square, where the formation of densely tangled groups of dislocations surrounding many of these holes is evidenced. Bottom: BF (left) and DF (right) images of one of these holes in detail (indicated with the arrow). DF is necessary to reveal these structural defects induced in the diamond by the laser pulse repetition.
