Increasing Young’s modulus of the elastomeric material with respect to the fabrication laser power. n = 3 independent samples, mean ± s.d. Under small deformations, Young’s modulus E of the cantilever picospring is calculated by an approximate formula E = FL2 / 3Iθ ( θ < 20°), where F, L and I represent the load force, the cantilever length and the moment of inertia of the cantilever, respectively. θ is defined as the deflection angle of the load position to the fixed end of the cantilever.
